Detection of sulfur dimers in SF6 and SF6/O2 plasma-etching discharges
- 3 April 1989
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 54 (14) , 1374-1376
- https://doi.org/10.1063/1.101404
Abstract
Sulfur dimers were detected in sulfur‐hexafluoride plasma‐etching discharges using optical emission spectroscopy and laser‐induced fluorescence spectroscopy. Dimer densities were estimated to be on the order of 1013/cm3 and appear to decrease rapidly with increasing oxygen content in the discharge.Keywords
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