Sub-μm linewidth input coils for low T c integrated thin-film dc superconducting quantum interference devices
- 20 July 1992
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 61 (3) , 336-338
- https://doi.org/10.1063/1.107929
Abstract
We have, for the first time, demonstrated integrated dc superconducting quantum interference devices (SQUIDs) with input coils of linewidth down to 0.5 μm. The SQUID inductance L consists of a single octagonal washer or two or four such washers configured in parallel. The input coil of inductance Li, which couples to L with a mutual inductance of Mi, consists of fine‐line octagonal spiral(s) fabricated in close proximity to the washer(s). For a two‐washer SQUID with twin 80‐turn, 0.5 μm spirals, Li=2.5 μH, Mi=12.7 nH, L=109 pH, and the coupling constant k2=0.85. This entire device occupies an area of less than 0.2 mm2.Keywords
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