X-Ray Photoemission Investigation of Excimer Laser Induced Etching of InP
- 1 January 1989
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- A review of excimer laser projection lithographyJournal of Vacuum Science & Technology B, 1988
- Properties of laser-induced thermochemical etching of InPJournal of Electronic Materials, 1988
- Chemical etching of GaAs and InP by chlorine: The thermodynamically predicted dependence on Cl2 pressure and temperatureJournal of Vacuum Science & Technology B, 1986
- Dry, laser-assisted rapid HBr etching of GaAsApplied Physics Letters, 1985
- Molecular Theory of Gases and LiquidsPhysics Today, 1955