Technology for the high-volume manufacturing of integrated surface-micromachined accelerometer products
- 1 September 1998
- journal article
- Published by Elsevier in Microelectronics Journal
- Vol. 29 (9) , 579-586
- https://doi.org/10.1016/s0026-2692(98)00021-4
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Micromechanical switches fabricated using nickel surface micromachiningJournal of Microelectromechanical Systems, 1997
- Stiction reduction processes for surfacemicromachinesTribology Letters, 1997
- An integrated force-balanced capacitive accelerometer for low-g applicationsSensors and Actuators A: Physical, 1996