Plasma CVD techniques for ceramic coating
- 1 January 1988
- journal article
- research article
- Published by Taylor & Francis in Welding International
- Vol. 2 (8) , 733-738
- https://doi.org/10.1080/09507118809447561
Abstract
(1988). Plasma CVD techniques for ceramic coating. Welding International: Vol. 2, No. 8, pp. 733-738.Keywords
This publication has 4 references indexed in Scilit:
- Preparation of titanium carbide films by plasma-enhanced chemical vapor deposition.SHINKU, 1987
- Preparation of titanium nitride films by plasma-enhanced chemical vapor deposition (II)SHINKU, 1986
- Adhesion of TiC and Ti(C,N) coatings on steelJournal of Vacuum Science & Technology A, 1985
- The plasma-assisted chemical vapour deposition of TiC, TiN and TiCxN1−xThin Solid Films, 1981