Thick-film resonant piezo-layers as new gravimetric sensors
- 1 January 1997
- journal article
- Published by IOP Publishing in Measurement Science and Technology
- Vol. 8 (1) , 42-48
- https://doi.org/10.1088/0957-0233/8/1/007
Abstract
Resonant piezo-layers (RPLs) manufactured in thick-film technology are proposed as highly sensitive gravimetric sensors. RPLs rely on a PZT-based screen printable paste which is used for the fabrication of planar elements on alumina substrates behaving as thickness-mode resonators. When operated at resonance, these elements are sensitive to a mass load applied on their free moving face, working as resonant microbalances with a frequency output, reaching a mass sensitivity of 114 kHz . This paper describes the paste preparation, background theory, frequency-tracking oscillator and the characterization of the sensors and anticipates their application in sensing arrays for chemical measurements.Keywords
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