Fabrication of piezoelectric thick-film low-voltage multilayer actuators using a new double-paste printing technique
- 31 August 1993
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 37-38, 106-111
- https://doi.org/10.1016/0924-4247(93)80020-h
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Determination of low-voltage actuator displacements in d.c. and a.c. electric fields using an optical interferometerSensors and Actuators A: Physical, 1993
- Recent topics of ceramic actuators how to develop new ceramic devicesFerroelectrics, 1989
- Deformable mirror using the PMN electrostrictorApplied Optics, 1981