Alternate-monolayer single-crystal GaAs-AlAs optical waveguides

Abstract
Optical waveguides have been fabricated by repeated alternate molecular‐beam depositions of ultrathin layers of GaAs and AlAs of from one to eight monolayers thickness per deposition. For an average core composition of 10% Al, optical losses of 2.0–2.5 cm−1 have been measured between 1.1 eV and the band gap. Transmission electron micrographs prove that the layered structures of these waveguides corresponds closely to the programmed deposition sequences.