Effect of the deposition temperature on the iridum film microstructure produced by metal-organic chemical vapour deposition: sample characterization using x-ray techniques
- 10 May 1993
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 227 (2) , 144-152
- https://doi.org/10.1016/0040-6090(93)90032-k
Abstract
No abstract availableKeywords
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