Transverse mode electrostatic microactuator for MEMS-based HDD slider

This publication has 6 references indexed in Scilit:

• A computationally practical approach to simulating complex surface-micromachined structures with fabrication non-idealities
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2005
• Groove depth uniformization in [110] Si anisotropic etching by ultrasonic wave and application to accelerometer fabrication
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2005
• Identification, position sensing, and control of an electrostatically-driven polysilicon microactuator
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2002
• Magnetic recording-head positioning at very high track densities using a microactuator-based, two-stage servo system
  IEEE Transactions on Industrial Electronics, 1995
• Simulation and experimental study of gray-tone lithography for the fabrication of arbitrarily shaped surfaces
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,1994
• Development of integrated suspension system for a nanoslider with an MR head transducer
  IEEE Transactions on Magnetics, 1993