Submicrometer lithographic patterning of thin gold films with a scanning tunneling microscope
- 7 June 1993
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 62 (23) , 2935-2937
- https://doi.org/10.1063/1.109202
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- Four-probe resistance measurements of nickel wires written with a scanning tunneling microscope/scanning electron microscope systemUltramicroscopy, 1992
- Topographic study of thin gold films grown on SiO2Ultramicroscopy, 1992
- Weak localization and conductance fluctuations in complex mesoscopic geometriesPhysical Review B, 1991
- Scanning tunneling microscope lithography: A solution to electron scatteringJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Investigations of undeveloped e-beam resist with a scanning tunneling microscopeJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Lithographic studies of an e-beam resist in a vacuum scanning tunneling microscopeJournal of Vacuum Science & Technology A, 1990
- Exposure of ultrathin polymer resists with the scanning tunneling microscopeJournal of Vacuum Science & Technology B, 1989
- Lithography with the scanning tunneling microscopeJournal of Vacuum Science & Technology B, 1986
- Polymerized monomolecular layers: A new class of ultrathin resins for microlithographyThin Solid Films, 1980
- Solid-state electron-induced polymerization of ω-tricosenoic acid multilayersJournal of Colloid and Interface Science, 1977