High frequency dielectric properties of thin-film PZT capacitors
- 1 October 1995
- journal article
- Published by Taylor & Francis in Integrated Ferroelectrics
- Vol. 10 (1-4) , 335-342
- https://doi.org/10.1080/10584589508012291
Abstract
We present a method for calculating the dielectric constant and the dissipation factor for thin-film ferroelectric capacitors from scattering parameter measurements at multi-gigahertz frequencies. Physical measurement is discussed along with description of the model upon which the calculation is based. Experimental results for 0.5 micron films of PZT are reported up to 15 GHz. Direct measurement is compared with indirectly calculated values at the 100 MHz to 1.5 GHz range, showing excellent agreement.Keywords
This publication has 3 references indexed in Scilit:
- Thickness-dependent electrical characteristics of lead zirconate titanate thin filmsJournal of Applied Physics, 1995
- Chemical etching of thin film PLZTFerroelectrics, 1992
- Preparation and Electrical Properties of Lanthanum‐Doped Lead Titanate Thin Films by Sol–Gel ProcessingJournal of the American Ceramic Society, 1991