Spectroscopic study of nanocrystalline TiO2 thin films grown by atomic layer deposition
- 1 December 1998
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 336 (1-2) , 295-298
- https://doi.org/10.1016/s0040-6090(98)01314-5
Abstract
No abstract availableKeywords
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