The In-Situ Measurement of Biaxial Modulus and Residual Stress of Multi-Layer Polymeric Thin Films
- 1 January 1990
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Microfabricated structures for the i n s i t u measurement of residual stress, Young’s modulus, and ultimate strain of thin filmsApplied Physics Letters, 1987
- A Blister Test for Adhesion of Polymer Films to SiO2The Journal of Adhesion, 1983