Comparison of a-Si1-xCx:H Layers Based on Methane, Di-, Tri- and Tetrasilylmethane as Feedstocks
- 1 January 1992
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Bonding and Release of Hydrogen in a-Si:C:H AlloysMRS Proceedings, 1985