Theory of implantation recoil atoms
- 16 June 1980
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 59 (2) , 835-842
- https://doi.org/10.1002/pssa.2210590251
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
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- Conduction in metal oxide thin films formed by oxygen ion implantationThin Solid Films, 1972
- Effects produced by ion bombardment and implantation into thin films and surfacesNuclear Instruments and Methods, 1971
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969
- ON THE NUMBER OF ATOMS DISPLACED BY IMPLANTED IONS OR ENERGETIC RECOIL ATOMSApplied Physics Letters, 1969
- The theory of recoil implantationRadiation Effects, 1969
- The influence of the scattering law on the radiation damage displacement cascadePhilosophical Magazine, 1965
- THE EFFECT OF CHANNELING ON DISPLACEMENT CASCADE THEORYApplied Physics Letters, 1963
- The Displacement of Atoms in Solids by RadiationReports on Progress in Physics, 1955