Backscattering investigation of low-temperature migration of chromium through gold films

Abstract
Backscattering of 3.0‐MeV 4He ions has been used to investigate the low‐temperature migration of Cr into and through thin Aufilms (1000 and 2000 Å) deposited by evaporation and sputtering. Significant Cr migration is seen at annealing temperatures of 250 and 450 °C for periods of 0.5–22 h, whereas no migration of Cr in the Au was detected in any of the as‐deposited samples or after a 150 °C 0.5‐h anneal.
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