Reduction of iron solubility in silicon with oxygen precipitates
- 19 May 1986
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 48 (20) , 1371-1373
- https://doi.org/10.1063/1.96913
Abstract
The solubilities of iron in samples treated with various oxygen precipitation treatments were compared. The solubility of iron was reduced by almost two orders of magnitude in samples containing low-temperature oxygen precipitates. It is suggested that a new phase forms, probably an oxygen-metal rich compound that is more stable than the FeSi2 silicide. This study suggests dramatic improvements for the efficiency of gettering processes.Keywords
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