Efficient bottom-emitting VCSEL arrays for highCW optical output power

Abstract
Two-dimensional vertical-cavity surface-emitting laser diode (VCSEL) arrays emitting at 980 nm wavelength have been designed and fabricated for high CW optical output powers. 3 × 3 oxide confined bottom emitting VCSEL arrays with maximum output powers up to 650 mW and 25% conversion efficiency at 270 mW under CW operation are described.