Angular resolved sputtering yields of noble metals and an Au–Ag alloy

Publisher Website
Google Scholar
Abstract
Sputtering of noble metals and an Au–Ag alloy with low keV ion bombardment is investigated by means of measuring angular distribution of sputter‐deposited material and by analysing the bombarded target with low energy. Auger electron spectroscopy (LEAES). The measurement provides information on the angular‐resolved sputtering yields and the compositional variation of the bombarded surface. The angular distributions of the sputtered particles vary with the measurement conditions: the energy and the type of bombarding ions, the crystallity of the bombarded surface and the vacuum conditions during sputtering. The measurement gives evidence of ion bombardment induced surface segregation on sputtering of the Au–Ag alloy.