A study of two-step silicon anisotropic etching for a polygon-shaped microstructure using KOH solution
- 31 July 1997
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 62 (1-3) , 646-651
- https://doi.org/10.1016/s0924-4247(97)01500-8
Abstract
No abstract availableKeywords
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