Radiation induced diffusion of Xe implanted into the AZ1350 polymer
- 1 February 1990
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 46 (1) , 313-316
- https://doi.org/10.1016/0168-583x(90)90719-b
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Non-regular depth profiles of light ions implanted into organic polymer filmsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
- Mass and energy dependence of implanted ion profiles in the AZ111 photoresistJournal of Applied Physics, 1986
- Distributions of light ions and foil destruction after irradiation of organic polymersJournal of Applied Physics, 1985
- A Monte Carlo computer program for the transport of energetic ions in amorphous targetsNuclear Instruments and Methods, 1980