High-resolution SEM observation of semiconductor device cross-sections
- 31 May 1973
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 16 (5) , 545-548
- https://doi.org/10.1016/0038-1101(73)90153-6
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Diffusion of Impurities in Polycrystalline SiliconJournal of Applied Physics, 1972
- Silicon gate technologySolid-State Electronics, 1970
- Evaporated film profiles over steps in substratesThin Solid Films, 1970
- Preparation of Thin Silicon Crystals by Electrochemical Thinning of Epitaxially Grown StructuresJournal of the Electrochemical Society, 1970
- Device failure analysis by scanning electron microscopyMicroelectronics Reliability, 1969
- Studies of anomalous diffusion of impurities in siliconSolid-State Electronics, 1966