Cross-Sectional TEM Sample Preparation for Multilayer Electronic Materials
- 1 January 1987
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Thin-film interactions in Si/SiO2/W-Ti/Al-1% Si systemJournal of Applied Physics, 1987
- Cross‐Section preparation for tem of film‐substrate combinations with a large difference in sputtering yieldsJournal of Electron Microscopy Technique, 1986
- TEM Cross Section Sample Preparation Technique for III–V Compound Semiconductor Device Materials by Chemical ThinningJournal of the Electrochemical Society, 1984
- The preparation of cross‐section specimens for transmission electron microscopyJournal of Electron Microscopy Technique, 1984
- Cross-sectional specimens for transmission electron microscopyJournal of Applied Physics, 1974