Simultaneous Determination of the Boron and Phosphorus Content in Silicate Glasses by FT-IR Spectroscopy
- 1 January 1984
- book chapter
- Published by ASTM International
- p. 358-363
- https://doi.org/10.1520/stp32666s
Abstract
Fourier transform infrared spectroscopy can be used for the rapid determination of the boron and phosphorus concentrations in borophosphosilicate glass films. A multicomponent matrix algebraic method is used in this procedure. Results of the measurements on a number of BPSG samples are presented and the factors affecting the accuracies of the measurements are discussed.This publication has 4 references indexed in Scilit:
- Matrix representations and criteria for selecting analytical wavelengths for multicomponent spectroscopic analysisAnalytical Chemistry, 1982
- Simultaneous determination of triglycerides, phospholipids, and cholesteryl esters by infrared spectrometryAnalytical Chemistry, 1982
- A simple technique for monitoring undercutting in plasma etchingSolid-State Electronics, 1980
- Interaction Between Phosphosilicate Glass Films and WaterJournal of the Electrochemical Society, 1974