Investigation of nitrogen incorporation into a-Si:H prepared by dc-magnetron sputtering
- 1 February 1991
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 127 (2) , 165-173
- https://doi.org/10.1016/0022-3093(91)90139-w
Abstract
No abstract availableKeywords
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