Range distributions of 11B+ in Co, CoSi2, Ti, and TiSi2
- 15 July 1988
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 64 (2) , 607-609
- https://doi.org/10.1063/1.341949
Abstract
The range distributions of 10–120 keV 11B+ in polycrystalline Co, Ti, CoSi2, and TiSi2 targets have been measured by secondary ion mass spectrometry. The obtained projected ranges Rp and projected range stragglings ΔRp are within 25% and 10%, respectively, of those predicted using the Monte Carlo computer program trim. By comparison the one‐dimensional Boltzmann transport calculation in suprem‐3 tends to overestimate Rp by as much as 300% at the highest ion energies.This publication has 7 references indexed in Scilit:
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