Computation of static shapes and voltages for micromachined deformable mirrors with nonlinear electrostatic actuators
- 1 January 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 5 (3) , 205-220
- https://doi.org/10.1109/84.536627
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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