Acoustic Accelerometers
- 1 March 1987
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
- Vol. 34 (2) , 237-242
- https://doi.org/10.1109/t-uffc.1987.26937
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- A Sensor Classification SchemeIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1987
- Accelerometer Sensor Using Piezoelectric ZnO Thin FilmsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1982
- Integrated silicon microbeam PI-FET accelerometerIEEE Transactions on Electron Devices, 1982
- Surface Acoustic Wave AccelerometerPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1981
- Dynamic micromechanics on silicon: Techniques and devicesIEEE Transactions on Electron Devices, 1978