Experimental study of drilling sub-10 μm holes in thin metal foils with femtosecond laser pulses
- 1 November 1999
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 152 (3-4) , 138-148
- https://doi.org/10.1016/s0169-4332(99)00331-1
Abstract
No abstract availableKeywords
This publication has 16 references indexed in Scilit:
- Short-pulse laser ablation of solid targetsPublished by Elsevier ,1999
- Beam delivery of femtosecond laser radiation by diffractive optical elementsApplied Physics A, 1998
- A review of ultrashort pulsed laser ablation of materialsJournal of Laser Applications, 1998
- Short-pulse UV laser ablation of solid and liquid metals: indiumApplied Physics A, 1997
- Laser ablation of metals and ceramics in picosecond–nanosecond pulsewidth in the presence of different ambient atmospheresApplied Surface Science, 1997
- Ablation of submicron structures on metals and semiconductors by femtosecond UV-laser pulsesApplied Surface Science, 1997
- Laser–solid interaction in the femtosecond time regimeApplied Surface Science, 1997
- Laser ablation and micromachining with ultrashort laser pulsesIEEE Journal of Quantum Electronics, 1997
- Femtosecond, picosecond and nanosecond laser ablation of solidsApplied Physics A, 1996
- Sub-picosecond UV laser ablation of metalsApplied Physics A, 1995