Tailored waveform modulation calculation for integral Auger spectra

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Abstract
Basic lock‐in amplifier principles and instrument response function formalism are reviewed to provide a mathematical model for potential modulation signal detection in Auger electron spectroscopy. The effect of sinusoidal modulation on a Gaussian peak is calculated exactly as a function of modulation amplitude. The result illustrates the degree of distortion and linearity of signal strength as a function of modulation. Nonsinusoidal modulations are considered and when proper waveforms are utilized can provide EN (E) and I (E) =FE′N (E′) dE′ measurements directly from the lock‐in amplifier. The removal of troublesome background effects is also accomplished to second‐ and third‐order terms depending upon the modulation used. Results of the application of the various tailored modulation waveforms on Auger spectra are presented.