Production of a quasi-travelling wave in silicon membranes with a thin deposited layer of sol—gel PZT
- 1 October 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 70 (3) , 291-295
- https://doi.org/10.1016/s0924-4247(98)00138-1
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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