How to place a Knudsen source to obtain optimal uniformity of film thickness on a spherical substrate holder

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1 January 1983

journal article
Published by Elsevier in Vacuum

Vol. 33 (1) , 19-23
https://doi.org/10.1016/0042-207x(83)90522-5

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

Uniformity of film thickness on rotating planetary planar substrates
Thin Solid Films, 1973
The distribution of thin films condensed on surfaces by the vacuum evaporation method
Vacuum, 1952