Uniformity of film thickness on rotating planetary planar substrates
- 1 January 1973
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 15 (1) , 55-64
- https://doi.org/10.1016/0040-6090(73)90203-4
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- An Algorithm for Optimization of Experimental Parameters for Maximum Uniformity of Film ThicknessJournal of Vacuum Science and Technology, 1972
- Fabrication of Multilayer Dielectric FilmsJournal of Vacuum Science and Technology, 1966
- The performance of a small rotating substrate holder for vacuum depositionJournal of Scientific Instruments, 1964
- Tolerances For Layer Thicknesses in Dielectric Multilayer Coatings and Interference Filters.Journal of Research of the National Bureau of Standards Section A: Physics and Chemistry, 1960
- The distribution of thin films condensed on surfaces by the vacuum evaporation methodVacuum, 1952