Surface properties of Si/SiO2 heterojunctions with electrolytically anodized oxide
- 1 May 1981
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 79 (2) , 113-116
- https://doi.org/10.1016/0040-6090(81)90267-4
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Tracer Investigation of Hydroxyls in SiO[sub 2] Films on SiliconJournal of the Electrochemical Society, 1971
- Investigation of thermally oxidised silicon surfaces using metal-oxide-semiconductor structuresSolid-State Electronics, 1965
- Evidence for Oxidation Growth at the Oxide-Silicon Interface from Controlled Etch StudiesJournal of the Electrochemical Society, 1964
- An investigation of surface states at a silicon/silicon oxide interface employing metal-oxide-silicon diodesSolid-State Electronics, 1962