Interface instability of r.f. sputtered silicon nitride films on silicon
- 1 April 1974
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 21 (2) , 245-253
- https://doi.org/10.1016/0040-6090(74)90111-4
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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