Amorphous hydrogenated silicon films produced by an expanding argon-silane plasma investigated with spectroscopic IR ellipsometry
- 1 September 1991
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 204 (1) , 59-75
- https://doi.org/10.1016/0040-6090(91)90494-i
Abstract
No abstract availableKeywords
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