Infrared ellipsometry study of the vibrational properties and the growth of hydrogenated amorphous silicon ultrathin films
- 15 May 1988
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 63 (10) , 5088-5091
- https://doi.org/10.1063/1.340408
Abstract
The first experimental study of hydrogenated amorphous silicon (a-Si:H) ultrathin films (df <500 Å) deposited on glass substrates using infrared spectroscopic phase-modulated ellipsometry is presented. The high sensitivity of this new technique is emphasized. In particular, SiH and SiH2 stretching bonds are identified on 50-Å-thick samples. It is shown that the structure of a-Si:H in the early stage of the growth (df <100 Å) may differ considerably from that of bulk materials: Hydrogen–silicon bonds are not observed in the first few seconds of the growth and the imaginary part of the dielectric function of the film is found to increase with df. These behaviors are attributed to an interaction of the growing film with the substrate.This publication has 14 references indexed in Scilit:
- Influence of the substrate on the early stage of the growth of hydrogenated amorphous silicon evidenced by kinetic ellipsometryJournal of Applied Physics, 1988
- IR ellipsometry study of oriented molecular monolayersThin Solid Films, 1988
- In-situ investigation of the early stage of the growth of a-Si : H on silica and tin dioxide substratesJournal of Non-Crystalline Solids, 1987
- I n s i t u investigation of the growth of rf glow-discharge deposited amorphous germanium and silicon filmsJournal of Applied Physics, 1987
- The nucleation and growth of glow-discharge hydrogenated amorphous siliconJournal of Applied Physics, 1986
- Hydrogen content of amorphous silicon films deposited in a multipole plasmaJournal of Applied Physics, 1985
- Oxidation of plasma-deposited hydrogenated amorphous siliconThin Solid Films, 1985
- Vibrational Spectra of Hydrogen in Silicon and GermaniumPhysica Status Solidi (b), 1983
- Fast polarization modulated ellipsometer using a microprocessor system for digital Fourier analysisReview of Scientific Instruments, 1982
- Infrared ellipsometry of adsorbed molecules: CO on evaporated Cu filmsSurface Science, 1976