A color vision system for film thickness determination

Publisher Website

23 March 2005

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

https://doi.org/10.1109/robot.1987.1087984

Abstract

No abstract available

This publication has 1 reference indexed in Scilit:

A color vision system for microelectronics: Application to oxide thickness measurements
Published by Institute of Electrical and Electronics Engineers (IEEE) ,1986