Roughness measurements in the picometric range using a polarization interferometer and a multichannel lockin detection technique
- 1 May 1998
- journal article
- Published by Elsevier in International Journal of Machine Tools and Manufacture
- Vol. 38 (5-6) , 715-717
- https://doi.org/10.1016/s0890-6955(97)00122-3
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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