Ultra-High Density VLSI Modules
- 1 September 1978
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Components, Hybrids, and Manufacturing Technology
- Vol. 1 (3) , 242-248
- https://doi.org/10.1109/tchmt.1978.1135276
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Processes for multilevel metallizationJournal of Vacuum Science and Technology, 1974
- Chemical Vapor Deposited Polycrystalline SiliconJournal of the Electrochemical Society, 1972