Long-life operation of an XeCl excimer laser

Abstract
An experimental investigation of the performance of an XeCl excimer laser operating with moelcular traps is reported. The effects of cold traps, active carbon, and molecular sieves on the lasing gas mixture has been tested in order to selectively remove contaminant reaction products which quence laser action. Best results have been obtained by using a 3‐Å molecular sieve directly inserted into the laser chamber. More than 180 000 shots have been obtained after 5 h of 10‐Hz laser operation with a single refill before the output power decayed to one‐half the initial value.

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