Pb-based ferroelectric thin film actuator for optical applications
- 1 March 1995
- journal article
- research article
- Published by Springer Nature in Microsystem Technologies
- Vol. 2 (1) , 26-31
- https://doi.org/10.1007/bf02739525
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Mechanical property measurements of thin films using load-deflection of composite rectangular membranePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Compact, high-displacement piezoelectric actuator with potential micromechanical applicationsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Surface-normal electrostatic/pneumatic actuatorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1992