Kinetic stability of missing-dimer and single-atom defects on Si(100)
- 15 September 1993
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 48 (11) , 8166-8171
- https://doi.org/10.1103/physrevb.48.8166
Abstract
Scanning tunneling microscopy shows that the Si(100) surface has a large number of missing-dimer vacancies and almost no missing-atom vacancies. In this paper we provide a kinetic explanation for these observations. We use the Stillinger-Weber potential to calculate the energy barriers opposing various atomic and dimer displacements along the surface. These calculations indicate that vacancy formation by thermal fluctuations is a very slow process. If a single-atom vacancy is formed the atom that used to be dimerized with the missing atom will leave the dimer row rapidly; the missing-atom vacancy is thus transformed into a missing-dimer vacancy. The chance that two adsorbed atoms will fill a missing-dimer vacancy is very low: the first atom that fills the vacancy leaves it quickly and its lifetime at the vacancy site is shorter than the time in which the second atom joins it; moreover, vacancy filling competes for adsorbed single atoms with capture by steps and islands and with dimer formation on top of the surface.Keywords
This publication has 39 references indexed in Scilit:
- Surface self-diffusion of Si on Si(001)Surface Science, 1992
- Anisotropy in surface migration of Si and Ge on Si(001)Surface Science, 1991
- Activation energy for surface diffusion of Si on Si(001): A scanning-tunneling-microscopy studyPhysical Review Letters, 1991
- Binding and diffusion of a Si adatom on the Si(100) surfacePhysical Review Letters, 1991
- Ab Initio Study of Elementary Processes in Silicon Homoepitaxy–Adsorption and Diffusion on Si(001)Japanese Journal of Applied Physics, 1990
- Dimer strings, anisotropic growth, and persistent layer-by-layer epitaxyPhysical Review B, 1989
- Growth and equilibrium structures in the epitaxy of Si on Si(001)Physical Review Letters, 1989
- Scanning-tunneling-microscopy study of single-domain Si(001) surfaces grown by molecular-beam epitaxyPhysical Review Letters, 1989
- Ordering kinetics at surfacesUltramicroscopy, 1989
- Nucleation and growth of epitaxial silicon on Si(001) and Si(111) surfaces by scanning tunneling microscopyUltramicroscopy, 1989