A self-consistent one-dimensional model for He nonequilibrium kinetics in RF discharges
- 1 September 1993
- journal article
- Published by Springer Nature in Plasma Chemistry and Plasma Processing
- Vol. 13 (3) , 499-519
- https://doi.org/10.1007/bf01465879
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- A parametric study of electron energy distribution functions and rate and transport coefficients in nonequilibrium helium plasmasPlasma Chemistry and Plasma Processing, 1992
- Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCCIEEE Transactions on Plasma Science, 1991
- Electron kinetics in a collision-dominated SiH4 rf plasma including self-consistent rf field strength calculationPlasma Chemistry and Plasma Processing, 1990
- Transition between different regimes of rf glow dischargesPhysical Review A, 1990
- Numerical model of rf glow dischargesPhysical Review A, 1987
- Ion Bombardment Secondaty Electron Maintenance of Steady RF DischargeIEEE Transactions on Plasma Science, 1986
- Variational calculations of accurate-He cross sections below 19 eVPhysical Review A, 1979
- Elastic and Inelastic Cross Sections for Electron-Hg Scattering from Hg Transport DataPhysical Review A, 1973
- Large-signal analysis of a silicon Read diode oscillatorIEEE Transactions on Electron Devices, 1969
- Calculations of Cathode-Fall CharacteristicsJournal of Applied Physics, 1962