Beam interactions in a focused ion beam system with a liquid metal ion source
- 31 January 1994
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 23 (1-4) , 107-110
- https://doi.org/10.1016/0167-9317(94)90115-5
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- High-resolution focused ion beamsReview of Scientific Instruments, 1993
- Improvement of beam properties by optimizing ion optics and minimizing beam interactionsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1992