Development of a multifunctional surface analysis system based on a nanometer scale scanning electron beam: Combination of ultrahigh vacuum-scanning electron microscopy, scanning reflection electron microscopy, Auger electron spectroscopy, and x-ray photoelectron spectroscopy
- 1 December 1996
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 67 (12) , 4185-4190
- https://doi.org/10.1063/1.1147567
Abstract
No abstract availableKeywords
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