Elastic properties of hydrogen-free amorphous carbon thin films and their relation with carbon–carbon bonding
- 1 September 1999
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 353 (1-2) , 208-213
- https://doi.org/10.1016/s0040-6090(99)00425-3
Abstract
No abstract availableKeywords
This publication has 26 references indexed in Scilit:
- Finite-element modeling of nanoindentation for evaluating mechanical properties of MEMS materialsSurface and Coatings Technology, 1998
- Stress-induced formation of high-density amorphous carbon thin filmsJournal of Applied Physics, 1997
- Amorphous carbon films rich in diamond deposited by magnetron sputteringMaterials Science and Engineering: B, 1997
- Hydrogen-free amorphous carbon films approaching diamond prepared by magnetron sputteringApplied Physics Letters, 1996
- Hardness, elastic modulus, and structure of very hard carbon films produced by cathodic-arc deposition with substrate pulse biasingApplied Physics Letters, 1996
- Pulsed laser deposition of amorphous diamond-like carbon films with ArF (193 nm) excimer laserJournal of Materials Research, 1993
- Diamond-like amorphous carbon films prepared by r.f. sputtering in argon: electron-assisted investigationsThin Solid Films, 1992
- An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experimentsJournal of Materials Research, 1992
- Characterization of chemical bonding and physical characteristics of diamond-like amorphous carbon and diamond filmsJournal of Materials Research, 1992
- Tip Surface Interactions in STM and AFMPhysica Scripta, 1987