Arrays of optoelectronic switching nodes comprised of flip-chip-bonded MQW modulators and detectors on silicon CMOS circuitry
- 1 February 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 8 (2) , 221-223
- https://doi.org/10.1109/68.484247
Abstract
We describe 8/spl times/8 arrays of smart pixels, designed and fabricated using MQW modulators and detectors flip-chip-solder-bonded to silicon CMOS circuits. The individual circuits implement 2 input, 1 output embedded control switching nodes. Four arrays from two different designs were fabricated and tested. For the array with the highest yield, 60 of 64 nodes functioned correctly at low speeds and were tested up to 250 Mb/s without re-adjusting individual bias voltages with the maximum speed of an individual node of 375 Mb/s. For the second-generation array, the center 4/spl times/8 section of the array was tested at data rates beyond 700 Mb/s with individual nodes having short term bit error rates below 10-/sup 11/.Keywords
This publication has 10 references indexed in Scilit:
- Large arrays of spatial light modulators hybridized to silicon integrated circuitsApplied Optics, 1996
- 3-D integration of MQW modulators over active submicron CMOS circuits: 375 Mb/s transimpedance receiver-transmitter circuitIEEE Photonics Technology Letters, 1995
- GaAs MQW modulators integrated with silicon CMOSIEEE Photonics Technology Letters, 1995
- 4/spl times/4 arrays of FET-SEED embedded control 2/spl times/1 optoelectronic switching nodes with electrical fan-outIEEE Photonics Technology Letters, 1994
- Optical energy considerations for diode-clamped smart pixel optical receiversIEEE Journal of Quantum Electronics, 1994
- Experimental sensitivity studies of diode-clamped FET-SEED smart-pixel optical receiversIEEE Journal of Quantum Electronics, 1994
- Batch fabrication and operation of GaAs-Al/sub x/Ga/sub 1-x/As field-effect transistor-self-electrooptic effect device (FET-SEED) smart pixel arraysIEEE Journal of Quantum Electronics, 1993
- Alignable epitaxial liftoff of GaAs materials with selective deposition using polyimide diaphragmsIEEE Photonics Technology Letters, 1991
- Optical receiver array in silicon bipolar technology with selfaligned, low parasitic III/V detectors for DC-1 Gbit/s parallel linksElectronics Letters, 1991
- Field-effect transistor self-electrooptic effect device: integrated photodiode, quantum well modulator and transistorIEEE Photonics Technology Letters, 1989