Determination of the etch rate of silicon in buffered HF using a 31Si tracer method
- 1 February 1969
- journal article
- research article
- Published by Elsevier in The International Journal of Applied Radiation and Isotopes
- Vol. 20 (2) , 139-140
- https://doi.org/10.1016/0020-708x(69)90156-2
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Observation of Etching of n-Type Silicon in Aqueous HF SolutionsJournal of the Electrochemical Society, 1967